High-frequency electronic component

ABSTRACT

A high-frequency electronic component includes a ceramic multilayer substrate, ground electrodes provided at different layers of the ceramic multilayer substrate, and a shielding film covering at least a side surface among surfaces of the ceramic multilayer substrate. Two or more of the ground electrodes are exposed to the side surface of the ceramic multilayer substrate but do not protrude from this side surface, and are electrically connected to the shielding film. On the side surface of the ceramic multilayer substrate, the two or more of the ground electrodes at least partially overlap each other in a thickness direction of the ceramic multilayer substrate, with a distance in the thickness direction between the overlapping ground electrodes being 5 μm or greater.

CROSS REFERENCE TO RELATED APPLICATION

This is a continuation of International Application No. PCT/JP2021/023895 filed on Jun. 24, 2021 which claims priority from Japanese Patent Application No. 2020-142403 filed on Aug. 26, 2020. The contents of these applications are incorporated herein by reference in their entireties.

BACKGROUND OF THE DISCLOSURE Field of the Disclosure

The present disclosure relates to high-frequency electronic components.

Description of the Related Art

Some high-frequency electronic components mounted on mobile devices and others are provided with a shielding film to block magnetic waves.

For example, Patent Literature 1 discloses a shielded packaged device including a ceramic multilayer substrate; a die mounted on the upper surface of the ceramic substrate; an overmold sealing the die; and a conformal conductive coating covering the upper and side surfaces of the overmold and the side surfaces of the ceramic multilayer substrate. The side surfaces of the ceramic multilayer substrate are provided with multiple conductive layers and these conductive layers are electrically connected with the conformal conductive coating so that the conformal conductive coating functions as a shielding film.

-   -   Patent Literature

-   Patent Literature 1: JP 2015-91135 A

BRIEF SUMMARY OF THE DISCLOSURE

A shielding film on the side surfaces of a ceramic multilayer substrate may be formed by sputtering, for example. In order to prevent formation of a shielding film on the mounting surface of the ceramic multilayer substrate, sputtering is performed with the ceramic multilayer substrate being placed such that the surface opposite to the mounting surface faces the target.

In the case where multiple conductive layers overlap in the thickness direction, as in the case of the ceramic multilayer substrate disclosed in Patent Literature 1, a phenomenon such as the micro-loading effect occurs, in other words, the film-forming rate changes due to the sparseness and denseness of the pattern. In this case, the shielding film is caused to have an insufficient thickness on the surface of the conductive layer at a position farther from the target, which causes poor electrical connection.

The present disclosure is made to solve the above issue and aims to provide a high-frequency electronic component having good electrical connection.

In a first embodiment, the high-frequency electronic component of the present disclosure includes: a ceramic multilayer substrate; ground electrodes provided at different layers of the ceramic multilayer substrate; and a shielding film covering at least a side surface among surfaces of the ceramic multilayer substrate, two or more of the ground electrodes being exposed to the side surface of the ceramic multilayer substrate but not protruding from this side surface, and being electrically connected to the shielding film, on the side surface of the ceramic multilayer substrate, the two or more of the ground electrodes at least partially overlapping each other in a thickness direction of the ceramic multilayer substrate, with a distance in the thickness direction between the overlapping ground electrodes being 5 μm or greater.

In a second embodiment, the high-frequency electronic component of the present disclosure includes: a ceramic multilayer substrate; ground electrodes provided at different layers of the ceramic multilayer substrate; and a shielding film covering at least a side surface among surfaces of the ceramic multilayer substrate, the ceramic multilayer substrate including a first main surface and a second main surface opposite to each other in a thickness direction of the ceramic multilayer substrate, the second main surface being a main surface to be a mounting surface, two or more of the ground electrodes being exposed to the side surfaces of the ceramic multilayer substrate and protruding from this side surface, and being electrically connected to the shielding film, on the side surface of the ceramic multilayer substrate, the two or more of the ground electrodes including a first ground electrode and a second ground electrode, the first ground electrode being provided at a layer closest to the first main surface among the layers provided with the respective ground electrodes and protruding from the side surface of the ceramic multilayer substrate, and the second ground electrode being provided at a layer next closest to the first main surface among the layers provided with the respective ground electrodes, the first ground electrode protruding from the side surface of the ceramic multilayer substrate at a maximum protruding amount of a (μm), in a side view of the ceramic multilayer substrate, a minimum distance between the first ground electrode and the second ground electrode being 3^(0.5)a+5 (μm) or greater.

The module of the present disclosure includes the high-frequency electronic component of the present disclosure.

The present disclosure can provide a high-frequency electronic component having good electrical connection.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIG. 1 is a schematic perspective view of an example of the first embodiment of the high-frequency electronic component of the present disclosure.

FIG. 2 is a perspective view of a ceramic multilayer substrate defining the high-frequency electronic component illustrated in FIG. 1 .

FIG. 3 is a schematic cross-sectional view of an example of the second embodiment of the high-frequency electronic component of the present disclosure.

FIG. 4 is a schematic view of another example of the first embodiment of the high-frequency electronic component of the present disclosure.

FIG. 5 is a schematic view of still another example of the first embodiment of the high-frequency electronic component of the present disclosure.

DETAILED DESCRIPTION OF THE DISCLOSURE

The high-frequency electronic component of the present disclosure is described hereinbelow.

The present disclosure is not limited to the following preferred embodiments, and may be suitably modified without departing from the gist of the present disclosure. Combinations of two or more preferred structures described in the following are also within the scope of the present disclosure.

High-Frequency Electronic Component

In the first embodiment, the high-frequency electronic component of the present disclosure includes: a ceramic multilayer substrate; ground electrodes provided at different layers of the ceramic multilayer substrate; and a shielding film covering at least a side surface among surfaces of the ceramic multilayer substrate, two or more of the ground electrodes being exposed to the side surface of the ceramic multilayer substrate but not protruding from this side surface, and being electrically connected to the shielding film, on the side surface of the ceramic multilayer substrate, the two or more of the ground electrodes at least partially overlapping each other in a thickness direction of the ceramic multilayer substrate, with a distance in the thickness direction between the overlapping ground electrodes being 5 μm or greater.

In the first embodiment of the high-frequency electronic component of the present disclosure, the distance between the ground electrodes overlapping each other in the thickness direction is 5 μm or greater on the same side surface of the ceramic multilayer substrate. Thus, when sputtering is performed to form a shielding film on the ground electrodes overlapping each other in the thickness direction of the ceramic multilayer substrate, the above structure prevents any influence of the distance from the target caused by a phenomenon such as the micro-loading effect. The structure is also less likely to cause the shielding film to have a smaller thickness on the surface of the ground electrode at a position farther from the target than on the surface of the ground electrode at a position closer to the target. This can therefore improve the adhesion between the ground electrodes and the shielding film and increase the electrical connection.

Ceramic Multilayer Substrate

In the first embodiment of the high-frequency electronic component of the present disclosure, the ceramic multilayer substrate may be, for example, a stack of an insulating layer containing a ceramic material and a wiring layer to serve as a conductive line.

Examples of the ceramic material contained in the insulating layer include a high temperature co-fired ceramic (HTCC) material and a low temperature co-fired ceramic (LTCC) material. Preferred is a low temperature co-fired ceramic material.

The low temperature co-fired ceramic material means a ceramic material sinterable at a firing temperature of 1000° C. or lower and is co-fireable with a metallic material, preferably such as silver or copper, used to form a conductive line.

Examples of the low temperature co-fired ceramic material include those containing SiO₂—CaO—Al₂O₃—B₂O₃ glass ceramic or SiO₂—MgO—Al₂O₃—B₂O₃ glass ceramic.

Alumina powder may also be used as a ceramic material.

For example, the wiring layer defines a passive element such as a capacitor or an inductor or defines a connection line that provides an electrical connection between elements.

Examples of the material defining the wiring layer include silver and copper.

The wiring layer may contain a ceramic material.

The ceramic material contained in the wiring layer is preferably the same as the ceramic material contained in the insulating layer.

The ceramic multilayer substrate may have any shape, and preferably has a substantially cubic shape having a first main surface and a second main surface opposite to each other in the thickness direction, a first side surface and a second side surface opposite to each other in the length direction perpendicular to the thickness direction, and a third side surface and a fourth side surface opposite to each other in the width direction perpendicular to the thickness direction and the length direction.

In the case of a ceramic multilayer substrate having a substantially cubic shape, the ceramic multilayer substrate preferably has a thickness of 200 μm or greater and 1400 μm or smaller, a length of 600 μm or greater and 4000 μm or smaller, and a width of 400 μm or greater and 2500 μm or smaller.

Ground Electrode

In the first embodiment of the high-frequency electronic component of the present disclosure, each ground electrode is a portion of the wiring layer provided inside the ceramic multilayer substrate and is a portion exposed to a side surface of the ceramic multilayer substrate and electrically connected to the shielding film.

On the same side surface of the ceramic multilayer substrate, ground electrodes are provided at different layers of the ceramic multilayer substrate.

The ground electrodes are exposed at different positions where they at least partially overlap each other in the thickness direction.

The distance in the thickness direction between the overlapping ground electrodes is 5 μm or greater, preferably 10 μm or greater, more preferably 20 μm or greater.

The distance in the thickness direction between the overlapping ground electrodes is preferably 800 μm or smaller.

The ground electrodes each may have any thickness, such as 5 μm or greater and 20 μm or smaller.

In the first embodiment of the high-frequency electronic component of the present disclosure, the ground electrodes do not protrude from any side surface of the ceramic multilayer substrate.

The cases where a ground electrode protrudes from any side surface of the ceramic multilayer substrate will be described in the second embodiment of the high-frequency electronic component of the present disclosure.

In the first embodiment of the high-frequency electronic component of the present disclosure, three or more ground electrodes overlapping each other in the thickness direction may be provided on the same side surface of the ceramic multilayer substrate.

In this case, the ground electrodes are provided such that every distance between two ground electrodes overlapping and adjacent to each other in the thickness direction is 5 μm or greater.

In a side view of the ceramic multilayer substrate, the length of a single ground electrode in the direction perpendicular to the thickness direction of the ceramic multilayer substrate is preferably 50 μm or greater and 400 μm or smaller.

Shielding Film

In the first embodiment of the high-frequency electronic component of the present disclosure, the shielding film covers at least a side surface among the surfaces of the ceramic multilayer substrate.

The shielding film is a metal film formed by sputtering. The film-forming method is not limited to sputtering. For example, the film may be formed by vapor deposition or CVD.

The average thickness of the shielding film is preferably, but not limited to, 1 μm or greater and 50 μm or smaller.

The shielding film may have a single layer, or may have a multilayer structure.

In the case of a multilayer structure, the shielding film is preferably defined by an adhesive layer, a conductive layer, and an anticorrosive layer sequentially from the side close to the ceramic multilayer substrate.

Examples of the material defining the adhesive layer include metals such as stainless steel, Cu, Ti, Cr, Ni, and Ti—Al alloy.

Examples of the material defining the conductive layer include metals such as Cu, Ni, Ag, and Al.

Examples of the material defining the anticorrosive layer include metals such as stainless steel, Ti, Cr, and Ti—Al alloy and metals having a high magnetic permeability such as Ni and permalloy.

The adhesive layer, the conductive layer, and the anticorrosive layer are each preferably formed by sputtering.

The shielding film includes any one of the adhesive layer, the conductive layer, and the anticorrosive layer, preferably includes at least the conductive layer, more preferably includes all of the adhesive layer, the conductive layer, and the anticorrosive layer.

An example of the structure of the high-frequency electronic component of the present disclosure is described with reference to FIG. 1 and FIG. 2 .

FIG. 1 is a schematic perspective view of an example of the first embodiment of the high-frequency electronic component of the present disclosure. FIG. 2 is a perspective view of a ceramic multilayer substrate defining the high-frequency electronic component illustrated in FIG. 1 .

A high-frequency electronic component 1 illustrated in FIG. 1 includes a ceramic multilayer substrate 10 and a shielding film 50 covering at least the side surfaces among the surfaces of the ceramic multilayer substrate 10.

The high-frequency electronic component 1 has a shape including a first main surface 1 a and a second main surface 1 b opposite to each other in the thickness direction (the direction indicated by an arrow T in FIG. 1), a first side surface 1 c and a second side surface 1 d opposite to each other in the length direction (the direction indicated by an arrow L in FIG. 1 ) perpendicular to the thickness direction, and a third side surface 1 e and a fourth side surface if opposite to each other in the width direction (the direction indicated by an arrow W in FIG. 1 ) perpendicular to the thickness direction and the length direction.

The shielding film 50 is provided on the first main surface 1 a, the first side surface 1 c, the second side surface 1 d, the third side surface 1 e, and the fourth side surface if of the high-frequency electronic component 1, but is not provided on the second main surface 1 b thereof.

A second main surface 10 b of the ceramic multilayer substrate 10 is exposed to the second main surface 1 b.

The second main surface 1 b, which is not provided with the shielding film 50, of the high-frequency electronic component 1 serves as a mounting surface. The high-frequency electronic component 1 may be, for example, an LC chip filter.

As illustrated in FIG. 2 , the ceramic multilayer substrate 10 defining the high-frequency electronic component 1 has a first main surface 10 a and the second main surface 10 b opposite to each other in the thickness direction (the direction indicated by an arrow T in FIG. 2 ), a first side surface 10 c and a second side surface 10 d opposite to each other in the length direction (the direction indicated by an arrow L in FIG. 1 ) perpendicular to the thickness direction, and a third side surface 10 e and a fourth side surface 10 f opposite to each other in the width direction (the direction indicated by an arrow W in FIG. 2 ) perpendicular to the thickness direction and the length direction.

Ground electrodes provided at different layers of the ceramic multilayer substrate 10 are exposed to the first side surface 10 c and to the fourth side surface 10 f.

The ground electrodes exposed to the first side surface 10 c include a first ground electrode 30 a provided at a layer closest to the first main surface 10 a among the layers provided with the respective ground electrodes and a second ground electrode 30 b provided at a layer next closest to the first main surface 10 a among the layers provided with the respective ground electrodes.

On the first side surface 10 c, the first ground electrode 30 a and the second ground electrode 30 b overlap each other in the thickness direction of the ceramic multilayer substrate 10. The distance between the first ground electrode 30 a and the second ground electrode 30 b overlapping each other (the length indicated by a double-headed arrow d₁ in FIG. 2 ) is 5 μm or greater.

In the case where the distance between the first ground electrode 30 a and the second ground electrode 30 b, which overlap each other in the thickness direction of the ceramic multilayer substrate 10, is 5 μm or greater, this structure prevents any influence of the distance from the target caused by a phenomenon such as the micro-loading effect when sputtering is performed to form a shielding film. The structure is also less likely to cause the shielding film to have an insufficient thickness on the side surfaces of the ceramic multilayer substrate, reducing the occurrence of poor electrical connection.

On the first side surface 10 c, the exposed length of the first ground electrode 30 a provided at a layer closest to the first main surface 10 a among the layers provided with the respective ground electrodes is preferably smaller than the exposed length of the second ground electrode 30 b provided at a layer next closest to the first main surface 10 a among the layers provided with the respective ground electrodes. In this case, the exposed length of the second ground electrode 30 b is greater than the exposed length of the first ground electrode 30 a.

The exposed length of a ground electrode means the total exposed length of all ground electrodes provided at the same layer in the direction perpendicular to the thickness direction on the same side surface of the ceramic multilayer substrate.

In the case of forming a shielding film by sputtering, the shielding film becomes thicker toward the surface opposite to the surface to serve as a mounting surface (in FIG. 1 and FIG. 2 , the second main surface 10 b). Accordingly, in the high-frequency electronic component 1 illustrated in FIG. 1 and FIG. 2 , the shielding film is likely to have a smaller thickness at a portion connected to the second ground electrode 30 b than at a portion connected to the first ground electrode 30 a. Thus, as illustrated in FIG. 2 , in the case where the total exposed length of the second ground electrodes 30 b provided at a layer next closest to the first main surface 10 a among the layers provided with the respective ground electrodes is preferred to be greater than the total exposed length of the first ground electrodes 30 a provided at a layer closest to the first main surface 10 a among the layers provided with the respective ground electrodes, the above structure can lead to an increased contact area between the second ground electrode 30 b, which is likely to become thin, and the shielding film 50 and can lead to more stable electrical connection between the second ground electrode 30 b and the shielding film 50.

The ground electrodes exposed to the fourth side surface 10 f include a first ground electrode 31 a provided at a layer closest to the first main surface 10 a among the layers provided with the respective ground electrodes and a second ground electrode 31 b provided at a layer next closest to the first main surface 10 a among the layers provided with the respective ground electrodes.

On the fourth side surface 10 f, the first ground electrode 31 a and the second ground electrode 31 b are provided at different layers of the ceramic multilayer substrate 10 and the distance between the first ground electrode 31 a and the second ground electrode 31 b overlapping each other in the thickness direction (in FIG. 2 , the length indicated by a double-headed arrow d₂) is 5 μm or greater.

In FIG. 2 , the first ground electrode 30 a exposed to the first side surface 10 c and the first ground electrode 31 a exposed to the fourth side surface 10 f are provided at the same layer in the thickness direction of the ceramic multilayer substrate 10. Alternatively, the first ground electrode 30 a and the first ground electrode 31 a exposed to different side surfaces may be provided at different layers.

Similarly, the second ground electrode 30 b exposed to the first side surface 10 c and the second ground electrode 31 b exposed to the fourth side surface 10 f may be provided at different layers of the ceramic multilayer substrate 10.

In the first embodiment of the high-frequency electronic component of the present disclosure, preferably, the ceramic multilayer substrate includes a first side surface and a second side surface opposite to each other in the length direction perpendicular to the thickness direction, and a third side surface and a fourth side surface opposite to each other in the width direction perpendicular to the thickness direction and the length direction, on at least one side surface among the first side surface, the second side surface, the third side surface, and the fourth side surface, two or more of the ground electrodes at least partially overlap each other in the thickness direction of the ceramic multilayer substrate, with the distance in the thickness direction between the overlapping ground electrodes being 5 μm or greater.

In the case where the ceramic multilayer substrate includes a first main surface, a second main surface, a first side surface, a second side surface, a third side surface, and a fourth side surface, the first side surface, the second side surface, the third side surface, and the fourth side surface correspond to the side surfaces of the ceramic multilayer substrate. In other words, a ceramic multilayer substrate in which, on at least one side surface among the first side surface, the second side surface, the third side surface, and the fourth side surface, two or more ground electrodes at least partially overlap each other in the thickness direction of the ceramic multilayer substrate with the distance in the thickness direction between the overlapping ground electrodes being 5 μm or greater is encompassed by the ceramic multilayer substrate defining the high-frequency electronic component of the present disclosure.

The ceramic multilayer substrate defining the first embodiment of the high-frequency electronic component of the present disclosure is at least such that ground electrodes are exposed to at least one side surface among the four side surfaces; that the ground electrodes are provided at different layers and overlap each other in the thickness direction of the ceramic multilayer substrate; and that the distance between the overlapping ground electrodes is 5 μm or greater.

Thus, for example, in the case where the distance in the thickness direction between ground electrodes provided at different layers and overlapping each other in the thickness direction on the first side surface of the ceramic multilayer substrate is 5 μm or greater, no ground electrode may be provided on a different side surface of the ceramic multilayer substrate, or one ground electrode may be exposed thereto, or two or more ground electrodes may be exposed thereto. Still, on a side surface where ground electrodes are exposed and provided at different layers and overlap each other in the thickness direction, the distance in the thickness direction between the overlapping ground electrodes is preferably 5 μm or greater.

In the second embodiment, the high-frequency electronic component of the present disclosure includes: a ceramic multilayer substrate; ground electrodes provided at different layers of the ceramic multilayer substrate; and a shielding film covering at least a side surface among surfaces of the ceramic multilayer substrate, the ceramic multilayer substrate including a first main surface and a second main surface opposite to each other in a thickness direction of the ceramic multilayer substrate, the second main surface being a main surface close to a mounting surface, two or more of the ground electrodes being exposed to one of the side surfaces of the ceramic multilayer substrate and protruding from this side surface, and being electrically connected to the shielding film, on the side surface of the ceramic multilayer substrate, the two or more of the ground electrodes including a first ground electrode and a second ground electrode, the first ground electrode being provided at a layer closest to the first main surface among the layers provided with the respective ground electrodes and protruding from the side surface of the ceramic multilayer substrate, and the second ground electrode being provided at a layer next closest to the first main surface among the layers provided with the respective ground electrodes, the first ground electrode protruding from the side surface of the ceramic multilayer substrate at a maximum protruding amount of a (μm), in a side view of the ceramic multilayer substrate, a minimum distance between the first ground electrode and the second ground electrode being 3^(0.5)a+5 (μm) or greater.

In the second embodiment of the high-frequency electronic component of the present disclosure, on the same side surface of the ceramic multilayer substrate, the minimum distance between the first ground electrode and the second ground electrode is 3^(0.5)a+5 (μm) or greater in a side view of the ceramic multilayer substrate, wherein a represents the maximum protruding amount (μm) of the first ground electrode from the side surface of the ceramic multilayer substrate. Thus, when sputtering is performed to form a shielding film on the ground electrodes overlapping each other in the thickness direction of the ceramic multilayer substrate, the above structure prevents any influence of the distance from the target caused by a phenomenon such as the micro-loading effect. The structure is also less likely to cause the shielding film to have a smaller thickness on the surface of the second ground electrode at a position farther from the target than on the surface of the first ground electrode at a position closer to the target. This can therefore improve the adhesion between the second ground electrode and the shielding film and increase the electrical connection.

In the second embodiment of the high-frequency electronic component of the present disclosure, the ground electrodes each protrude from a side surface of the ceramic multilayer substrate.

Each ground electrode may have a protruding length of preferably, but not limited to, 2.5 μm or greater and 10 μm or smaller from the side surface of the ceramic multilayer substrate.

In the case where ground electrodes protrude from a side surface of the ceramic multilayer substrate and sputtering is performed to form the shielding film, a region is generated where the sputtering is less likely to proceed behind a protruding portion from the side surface of the ceramic multilayer substrate. If another ground electrode is provided at this region, the shielding film is less likely to be formed on the surface of the ground electrode. This may result in poor electrical connection between the ground electrode and the shielding film.

In contrast, in the case where the minimum distance between the first ground electrode and the second ground electrode is 3^(0.5)a+5 μm or greater, the second ground electrode is less likely to be behind the first ground electrode. This results in improved electrical connection between the second ground electrode and the shielding film.

In other words, in the case where the first ground electrode protrudes from a side surface of the ceramic multilayer substrate, improved electrical connection between the second ground electrode and the shielding film can be achieved by increasing the distance between the first ground electrode and the second ground electrode by a predetermined distance determined by the maximum protruding amount a in addition to the distance between the first ground electrode and the second ground electrode (5 μm or greater), which is generated in the case where the first ground electrode does not protrude from a side surface of the ceramic multilayer substrate, so that the minimum distance between the first ground electrode and the second ground electrode is set to 3^(0.5)a+5 μm or greater.

An example of a method of allowing a ground electrode to protrude from a side surface of the ceramic multilayer substrate is a method of plating the surface of a ground electrode not protruding from the side surface of the ceramic multilayer substrate.

FIG. 3 is a schematic cross-sectional view of an example of the second embodiment of the high-frequency electronic component of the present disclosure.

A high-frequency electronic component 2 illustrated in FIG. 3 includes a ceramic multilayer substrate 11 and a shielding film 50.

The ceramic multilayer substrate 11 includes a first main surface 11 a and a second main surface 11 b opposite to each other in the thickness direction. The first main surface 11 a and a fourth side surface 11 f are covered with the shielding film 50. Although not illustrated in FIG. 3 , the shielding film 50 also covers a third side surface opposite to the fourth side surface 11 f as well as a first side surface and a second side surface which are opposite to each other in the direction that is perpendicular to the direction in which the third side surface and the fourth side surface 11 f are opposite to each other and that is perpendicular to the thickness direction of the ceramic multilayer substrate 11.

The high-frequency electronic component 2 includes a first main surface 2 a and a second main surface 2 b opposite to each other in the thickness direction.

The second main surface 11 b of the ceramic multilayer substrate 11 is exposed to the second main surface 2 b of the high-frequency electronic component 2. Thus, the second main surface 11 b of the ceramic multilayer substrate 11 is to serve as a mounting surface.

Ground electrodes provided at different layers are exposed to the fourth side surface 11 f of the ceramic multilayer substrate 11.

The ground electrodes include a first ground electrode 32 a provided at a layer closest to the first main surface 11 a among the layers provided with the respective ground electrodes and a second ground electrode 32 b provided at a layer next closest to the first main surface 11 a among the layers provided with the respective ground electrodes.

The first ground electrode 32 a includes a protrusion 33 a protruding from the fourth side surface 11 f of the ceramic multilayer substrate 11. The protruding amount of the first ground electrode 32 a from the fourth side surface 11 f of the ceramic multilayer substrate 11 corresponds to the length indicated by a double-headed arrow a.

The second ground electrode 32 b includes a protrusion 33 b protruding from the fourth side surface of the ceramic multilayer substrate 11.

In a side view of the ceramic multilayer substrate 11, the minimum distance between the first ground electrode 32 a and the second ground electrode 32 b (in FIG. 3 , the length indicated by a double-headed arrow d₂) is 3^(0.5)a+5 μm or greater.

In the second embodiment of the high-frequency electronic component of the present disclosure, three or more ground electrodes overlapping each other in the thickness direction may be provided on the same side surface of the ceramic multilayer substrate. With reference to a side view of this side surface of the ceramic multilayer substrate, the distance between the ground electrodes excluding the minimum distance between the first ground electrode and the second ground electrode is described below.

In this case, every minimum distance between a ground electrode closer to the first main surface and a ground electrode closer to the second main surface among two adjacent ground electrodes is preferably 3^(0.5)b+5 μm or greater in a side view of the ceramic multilayer substrate, wherein b represents the maximum protruding amount (μm) of the ground electrode provided closer to the first main surface.

In the second embodiment of the high-frequency electronic component of the present disclosure, features other than protruding of ground electrodes from a side surface of the ceramic multilayer substrate and the distance between the first ground electrode and the second ground electrode, such as the structure and preferred material of the ceramic multilayer substrate and the structure and preferred material of the shielding film, are common to those in the first embodiment of the high-frequency electronic component of the present disclosure.

The features common to the high-frequency electronic components of the present disclosure are described hereinbelow with the first embodiment of the high-frequency electronic component of the present disclosure taken as an example. Accordingly, the following features are applicable to the second embodiment of the high-frequency electronic component of the present disclosure.

In the high-frequency electronic component of the present disclosure, ground electrodes may be provided at the same layer of the ceramic multilayer substrate.

In the high-frequency electronic component of the present disclosure, an electronic component may be mounted on the first main surface or the second main surface of the ceramic multilayer substrate.

The electronic component mounted on the first main surface or the second main surface is not the high-frequency electronic component of the present disclosure.

FIG. 4 is a schematic view of another example of the first embodiment of the high-frequency electronic component of the present disclosure.

FIG. 4 schematically illustrates the positions of ground electrodes exposed to side surfaces of the ceramic multilayer substrate, electronic components mounted on the first main surface of the ceramic multilayer substrate, and a mold resin sealing the electronic components.

A high-frequency electronic component 3 includes a ceramic multilayer substrate 12 and a shielding film 50.

The ceramic multilayer substrate 12 is provided with electronic components 40 via wiring layers 20 on a first main surface 12 a.

The first main surface 12 a of the ceramic multilayer substrate 12 and the electronic components 40 are sealed by a mold resin 60. Surfaces (upper surface and side surfaces) of the mold resin 60 and a third side surface 12 e and a fourth side surface 12 f of the ceramic multilayer substrate 12 are covered with the shielding film 50.

Although not illustrated in FIG. 4 , the shielding film 50 also covers a first side surface and a second side surface which are opposite to each other in the direction that is perpendicular to the direction in which the third side surface 12 e and the fourth side surface 12 f are opposite to each other and that is perpendicular to the thickness direction of the ceramic multilayer substrate.

The high-frequency electronic component 3 includes a first main surface 3 a and a second main surface 3 b opposite to each other in the thickness direction.

The second main surface 12 b of the ceramic multilayer substrate 12 is exposed to the second main surface 3 b of the high-frequency electronic component 3. Thus, the second main surface 12 b of the ceramic multilayer substrate 12 is to serve as a mounting surface.

The second main surface 12 b of the ceramic multilayer substrate 12 is provided with mounting terminals 70.

As illustrated in FIG. 4 , the thickness of the shielding film 50 is tapered from the first main surface 3 a toward the second main surface 3 b. This is because the sputtering is performed with the target being placed closer to the first main surface 3 a.

The ceramic multilayer substrate 12 illustrated in FIG. 4 includes first ground electrodes 34 a 1, 34 a 2, 34 a 3, and 34 a 4 and second ground electrodes 34 b 1, 34 b 2, 34 b 3, and 34 b 4 exposed to the same side surface (first side surface, not illustrated).

The first ground electrodes 34 a 1, 34 a 2, 34 a 3, and 34 a 4 and the second ground electrodes 34 b 1, 34 b 2, 34 b 3, and 34 b 4 are provided at different layers of the ceramic multilayer substrate 12. The first ground electrode 34 a 1 and the second ground electrode 34 b 1, the first ground electrode 34 a 2 and the second ground electrode 34 b 2, and the first ground electrode 34 a 4 and the second ground electrode 34 b 4 overlap each other in the thickness direction of the ceramic multilayer substrate 12.

The distance between the ground electrodes overlapping each other in the thickness direction (in FIG. 4 , the length indicated by a double-headed arrow d₄) is 5 μm or greater.

The first ground electrode 34 a 3 and the second ground electrode 34 b 3 do not overlap each other in the thickness direction.

In other words, the high-frequency electronic component of the present disclosure may include ground electrodes not overlapping each other in the thickness direction on the same side surface of the ceramic multilayer substrate.

In the high-frequency electronic component of the present disclosure, preferably, the number of the first ground electrodes provided at a layer closest to the main surface opposite to the main surface to serve as a mounting surface among the layers provided with the respective ground electrodes is smaller than the number of the second ground electrodes provided at a layer next closest to the main surface opposite to the main surface to serve as the mounting surface among the layers provided with the respective ground electrodes.

In this case, the number of the second ground electrodes is greater than the number of the first ground electrodes.

The greater the number of ground electrodes provided at the same layer of the ceramic multilayer substrate, the less easily burrs are generated on the surfaces of the ground electrodes and the better the connection with the shielding film is.

Thus, in the case where the number of the first ground electrodes is smaller than the number of the second ground electrodes, the second ground electrodes and the shielding film can exhibit improved connection.

For example, the first side surface of the ceramic multilayer substrate 13 illustrated in FIG. 5 is provided with four first ground electrodes (35 a 1, 35 a 2, 35 a 3, 35 a 4) and five second ground electrodes (35 b 1, 35 b 2, 35 b 3, 35 b 4, 35 b 5). Thus, the number of the second ground electrodes is greater than the number of the first ground electrodes.

Examples of the types of electronic components mounted on the ceramic multilayer substrate include, but are not limited to, an IC, a SAW filter, a capacitor, an inductor, and a resistor.

Method for Producing High-Frequency Electronic Component

Next, an example of a method for producing the high-frequency electronic component of the present disclosure is described.

Described below is a case where an LTCC material is used as a ceramic material.

First, LTCC green sheets to define ceramic layers are produced.

Next, each green sheet is provided with a via hole at a predetermined site and the via hole is filled with conductive paste. The conductive paste filling the via hole is fired to form a via conductor.

The conductive paste may be prepared by mixing powder of Cu or other metal, a plasticizer, an organic solvent, and other components with a binder. This conductive paste may be further combined with a ceramic material.

Next, conductive paste is printed on a main surface of the green sheet.

Here, the position of printing the conductive paste on each green sheet and the thicknesses and/or the number of green sheets are adjusted such that ground electrodes exposed to a side surface of a singulated stack overlap each other on the same side surface and the distance in the thickness direction between the overlapping ground electrodes is 5 μm or greater.

The conductive paste may be printed by screen printing, inkjet printing, gravure printing, or the like.

The printed conductive paste is fired to form a wiring layer.

Next, multiple green sheets each provided with the conductive paste to serve as a wiring layer and the conductive paste to serve as a via conductor are stacked, and this stack is compressed in a mold. The pressure and the temperature at this step may be set as appropriate.

Next, the compressed stack is singulated.

Singulation may be performed by dicing, guillotine cutting, laser cutting, or the like.

If necessary, the singulated stacks may be subjected to barrel finishing.

The wiring layers exposed to a side surface of the stack by singulation serve as ground electrodes.

Next, the singulated stacks are fired.

In the case of a Cu-based conductive paste, the stacks are preferably fired in a reducing atmosphere (e.g., N₂ atmosphere).

These steps provide a ceramic multilayer substrate.

The first main surface and/or the second main surface of the ceramic multilayer substrate may be provided with any component such as an electronic component or may be sealed by a mold resin, if necessary.

The mold resin used may be a common sealing resin such as a glass epoxy resin, for example.

The surfaces of the ground electrodes exposed to a side surface of the ceramic multilayer substrate may be plated, if necessary.

This plating treatment on the surfaces of the ground electrodes forms protrusions on the ground electrodes and improves the connection between the ground electrodes and the shielding film.

If the surfaces of the ground electrodes are not plated, the first embodiment of the high-frequency electronic component of the present disclosure is to be produced. If the surfaces of the ground electrodes are plated, the second embodiment of the high-frequency electronic component of the present disclosure is to be produced.

Then, multiple ceramic multilayer substrates are arranged in a tray for sputtering.

In order to prevent unnecessary deposition of the sputtering film (shielding film) on the surface to be the mounting surface of each ceramic multilayer substrate, paste or tape may be attached to this surface in advance.

Adjacent ceramic multilayer substrates arranged in the tray may be apart from each other at any distance.

If necessary, dry etching may be performed before sputtering.

Dry etching may be performed using an Ar ion gun.

Dry etching enables washing of the ceramic multilayer substrates as well as coarsening of the surfaces of the ceramic multilayer substrates, improving the adhesive strength of the shielding film.

Next, the tray for sputtering is placed inside the chamber of a sputtering device and an adhesive layer is formed.

Formation of the adhesive layer is achieved by applying a voltage to a stainless steel target for a predetermined period of time. The thickness thereof is preferably, for example, about 0.01 μm or greater and about 0.5 μm or smaller.

Next, a conductive layer is formed on the adhesive layer by sputtering.

Formation of the conductive layer is achieved by applying a voltage to a Cu target for a predetermined period of time.

The thickness thereof is preferably adjusted to be about 0.9 μm or greater and about 3.0 μm or smaller at a portion covering a side surface of the ceramic multilayer substrate, for example.

Next, an anticorrosive layer is formed on the conductive layer by sputtering, whereby a high-frequency electronic component is obtained.

Formation of the anticorrosive layer is achieved by applying a voltage to a stainless steel target for a predetermined period of time.

The thickness thereof is preferably, for example, about 0.03 μm or greater and about 1.5 μm or smaller.

The high-frequency electronic component of the present disclosure may be a chip component or a substrate.

A product further including a passive element incorporated in the ceramic multilayer substrate is an example of the high-frequency electronic component of the present disclosure used as a chip component.

Examples of the passive element include a capacitor, an inductor, and an LC filter.

A product further including a different electronic component mounted on the ceramic multilayer substrate is an example of the high-frequency electronic component of the present disclosure used as a substrate.

The different electronic component is preferably mounted on the first main surface or the second main surface of the ceramic multilayer substrate.

Examples of the different electronic component include a capacitor, an inductor, a resistor, a filter, and an IC.

Module

The module of the present disclosure includes the high-frequency electronic component of the present disclosure.

Examples of the module of the present disclosure include a module including a substrate and the high-frequency electronic component of the present disclosure mounted on the substrate and a module including a ceramic multilayer substrate defining the high-frequency electronic component, an electronic component mounted on each of the first main surface and the second main surface of the ceramic multilayer substrate, and a mold resin sealing the electronic components.

An example of the module is, for example, an RF module.

FIG. 5 is a schematic view of an example of the module of the present disclosure.

FIG. 5 schematically illustrates the positions of ground electrodes exposed to side surfaces of the ceramic multilayer substrate, electronic components mounted on the first main surface and the second main surface of the ceramic multilayer substrate, and mold resins sealing the electronic components.

A module 5 includes a high-frequency electronic component 4 including a ceramic multilayer substrate 13 and a shielding film 50 and electronic components 40 each mounted on a first main surface 13 a or a second main surface 13 b of the ceramic multilayer substrate 13 via a corresponding wiring layer(s) 20. Each of the electronic components 40 mounted on the first main surface 13 a or the second main surface 13 b of the ceramic multilayer substrate 13 is sealed by a mold resin 60 or 61.

A third side surface 13 e and a fourth side surface 13 f of the ceramic multilayer substrate 13 are covered with the shielding film 50. Also, side surfaces and the upper surface of the mold resin 60 and side surfaces of the mold resin 61 are covered with the shielding film 50.

The second main surface 13 b of the ceramic multilayer substrate 13 is provided with mounting terminals 71 penetrating the mold resin 61, with the mounting terminals 71 exposed to a second main surface 5 b of the module 5. Thus, the second main surface 5 b serves as the mounting surface among the first main surface 5 a and the second main surface 5 b of the module 5 opposite to each other in the thickness direction.

The module 5 is also referred to as a double-mounted module because both the first main surface 13 a and the second main surface 13 b of the ceramic multilayer substrate 13 defining the high-frequency electronic component 4 are provided with the electronic components 40.

The ceramic multilayer substrate 13 includes first ground electrodes 35 a 1, 35 a 2, 35 a 3, and 35 a 4 and second ground electrodes 35 b 1, 35 b 2, 35 b 3, 35 b 4, and 35 b 5 exposed to the same side surface (first side surface, not illustrated).

The first ground electrodes 35 a 1, 35 a 2, 35 a 3, and 35 a 4 and the second ground electrodes 35 b 1, 35 b 2, 35 b 3, 35 b 4, and 35 b 5 are provided at different layers of the ceramic multilayer substrate 13.

The first ground electrode 35 a 1 and the second ground electrode 35 b 1 overlap each other, the first ground electrode 35 a 1 and the second ground electrode 35 b 2 overlap each other, and the first ground electrode 35 a 4 and the second ground electrode 35 b 5 overlap each other, in the thickness direction of the ceramic multilayer substrate 13.

The distance between the ground electrodes overlapping each other in the thickness direction (in FIG. 5 , the length indicated by a double-headed arrow d₅) is 5 μm or greater.

The first ground electrodes 35 a 2 and 35 a 3 do not overlap the second ground electrodes 35 b 3 and 35 b 4, respectively, in the thickness direction.

In the module of the present disclosure, the electronic components mounted on the first main surface and the second main surface of the ceramic multilayer substrate defining the high-frequency electronic component are each the same as the electronic component that may be mounted on the first main surface or the second main surface of the ceramic multilayer substrate in the high-frequency electronic component of the present disclosure.

EXAMPLES

The following provides examples that more specifically disclose the high-frequency electronic component of the present disclosure. The present disclosure is not limited to these examples.

(Sample 1)

Green sheets were each punched to be provided with a through hole. This through hole was filled with a copper-containing conductive paste, whereby a via conductor was formed.

The copper-containing conductive paste contained glass powder, which is the low temperature co-fired ceramic material contained in the green sheets. The weight proportion of the low temperature co-fired ceramic material to the total weight of the metal and the low temperature co-fired ceramic material in the conductive paste was 10%.

Further, conductive paste was printed in a pattern to form a wiring layer including ground electrodes.

Then, the green sheets were stacked and the resulting stack was pressed in the thickness direction.

Next, the pressed stack was cut and singulated.

The cut and singulated stacks were then fired, whereby ceramic multilayer substrates were obtained.

The low temperature co-fired ceramic material and the conductive paste were co-fired, whereby insulating layers, wiring layers, and ground electrodes were formed.

The thickness per single insulating layer formed after the firing was 5 μm in the form of insulating layer in the case where the thickness was 10 μm in the form of green sheet.

The thickness of each ground electrode was 5 μm.

Each ceramic multilayer substrate had a substantially cubic shape having a first main surface and a second main surface opposite to each other in the thickness direction, a first side surface and a second side surface opposite to each other in the length direction perpendicular to the thickness direction, and a third side surface and a fourth side surface opposite to each other in the width direction perpendicular to the thickness direction and the length direction.

The first side surface was provided with a first ground electrode and a second ground electrode exposed to different layers of the ceramic multilayer substrate and overlapping each other in the thickness direction. The first ground electrode was provided closest to the first main surface, while the second ground electrode was provided closest to the second main surface.

The first ground electrode and the second ground electrode did not protrude from the first side surface of the ceramic multilayer substrate. In other words, the maximum protruding amounts a of the first ground electrode and the second ground electrode from the side surface of the ceramic multilayer substrate were 0 μm.

Formation of Shielding Film

The ceramic multilayer substrate was placed inside the chamber of a sputtering device and, with the first main surface facing the target, the following layers were formed in the stated order so that the shielding film was formed. The thicknesses of the layers of the shielding film formed on the surface of the first ground electrode, which is the ground electrode at a position closest to the target, were adjusted to the following values.

1) Adhesive layer: stainless steel target, thickness 0.3 μm 2) Conductive layer: Cu target, thickness 1.0 μm 3) Anticorrosive layer: stainless steel target, thickness 0.7 μm

The shielding film was formed on the ceramic multilayer substrate by the aforementioned procedure, whereby a high-frequency electronic component was produced.

(Samples 2 to 9)

Samples 2 to 9 were produced in such a manner that the distance in the thickness direction between the ground electrodes overlapping each other in the thickness direction was 1 μm, 3 μm, 7 μm, 10 μm, 15 μm, 20 μm, 25 μm, or 30 μm by adjusting the thicknesses and the number of green sheets.

(Samples 10 to 18)

Samples 10 to 18 were produced in the same manner as in Samples 1 to 9 except that the ceramic multilayer substrate was plated before formation of a shielding film and that a 3-μm protrusion was provided at a surface of each ground electrode. In a side view of the first side surface of the ceramic multilayer substrate, the minimum distance between the first ground electrode and the second ground electrode was 1 μm, 3 μm, 7 μm, 10 μm, 15 μm, 20 μm, 25 μm, or 30 μm.

(Samples 19 to 27)

Samples 19 to 27 were produced in the same manner as in Samples 10 to 18 except that the plating conditions were changed and that a 5-μm protrusion was provided at a surface of each ground electrode. In a side view of the first side surface of the ceramic multilayer substrate, the minimum distance between the first ground electrode and the second ground electrode was the same as in Samples 10 to 18.

(Samples 28 to 36)

Samples 28 to 36 were produced in the same manner as in Samples 10 to 18 except that the plating conditions were changed and that a 7-μm protrusion was provided at a surface of each ground electrode. In a side view of the first side surface of the ceramic multilayer substrate, the minimum distance between the first ground electrode and the second ground electrode was the same as in Samples 10 to 18.

(Samples 37 to 45)

Samples 37 to 45 were produced in the same manner as in Samples 10 to 18 except that the plating conditions were changed and that a 10-μm protrusion was provided at a surface of each ground electrode. In a side view of the first side surface of the ceramic multilayer substrate, the minimum distance between the first ground electrode and the second ground electrode was the same as in Samples 10 to 18.

Check of Shielding Film

Each of Samples 1 to 45 was cut in the direction parallel to the thickness direction of the ceramic multilayer substrate and parallel to the length direction and the cross section was observed using a scanning electron microscope (SEM). Thereby, the shielding film provided on the surface of the ground electrode was checked for any disconnection or damage. Those having no disconnection or damage of the shielding film were evaluated as “Good”, while those having any disconnection or damage were evaluated as “poor”. The results are shown in Table 1 and Table 2.

TABLE 1 Distance between ground electrodes (μm) 1 3 5 7 10 15 20 25 30 Maximum protruding 0 Poor Poor Good Good Good Good Good Good Good amount a of first ground electrode (μm)

TABLE 2 Minimum distance between first ground electrode and second ground electrode (μm) 1 3 5 7 10 15 20 25 30 Maximum protruding 3 Poor Poor Poor Poor Poor Good Good Good Good amount a of first 5 Poor Poor Poor Poor Poor Good Good Good Good ground electrode (μm) 7 Poor Poor Poor Poor Poor Poor Good Good Good 10 Poor Poor Poor Poor Poor Poor Poor Good Good

The results of Tables 1 and 2 demonstrate that the high-frequency electronic component of the present disclosure exhibits good electrical connection.

-   1, 2, 3, 4: high-frequency electronic component -   1 a, 2 a, 3 a: first main surface of high-frequency electronic     component -   1 b, 2 b, 3 b: second main surface of high-frequency electronic     component -   1 c: first side surface of high-frequency electronic component -   1 d: second side surface of high-frequency electronic component -   1 e: third side surface of high-frequency electronic component -   1 f: fourth side surface of high-frequency electronic component -   10, 11, 12, 13: ceramic multilayer substrate -   10 a, 11 a, 12 a, 13 a: first main surface of ceramic multilayer     substrate -   10 b, 11 b, 12 b, 13 b: second main surface of ceramic multilayer     substrate -   10 c: first side surface of ceramic multilayer substrate -   10 d: second side surface of ceramic multilayer substrate -   10 e, 12 e, 13 e: third side surface of ceramic multilayer substrate -   10 f, 11 f, 12 f, 13 f: fourth side surface of ceramic multilayer     substrate -   20: wiring layer -   30 a, 31 a, 32 a, 34 a 1, 34 a 2, 34 a 3, 34 a 4, 35 a 1, 35 a 2, 35     a 3, 35 a 4: first ground electrode -   30 b, 31 b, 32 b, 34 b 1, 34 b 2, 34 b 3, 34 b 4, 35 b 1, 35 b 2, 35     b 3, 35 b 4, 35 b 5: second ground electrode -   33 a, 33 b: protrusion -   40: electronic component -   5: module -   5 a: first main surface of module -   5 b: second main surface of module -   50: shielding film -   60: mold resin -   70, 71: mounting terminal 

1. A high-frequency electronic component comprising: a ceramic multilayer substrate; ground electrodes provided at different layers of the ceramic multilayer substrate; and a shielding film covering at least a side surface among surfaces of the ceramic multilayer substrate, two or more of the ground electrodes being exposed to the side surface of the ceramic multilayer substrate but not protruding from this side surface, and being electrically connected to the shielding film, on the side surface of the ceramic multilayer substrate, the two or more of the ground electrodes at least partially overlapping each other in a thickness direction of the ceramic multilayer substrate, with a distance in the thickness direction between the overlapping ground electrodes being 5 μm or greater.
 2. A high-frequency electronic component comprising: a ceramic multilayer substrate; ground electrodes provided at different layers of the ceramic multilayer substrate; and a shielding film covering at least a side surface among surfaces of the ceramic multilayer substrate, the ceramic multilayer substrate including a first main surface and a second main surface opposite to each other in a thickness direction of the ceramic multilayer substrate, the second main surface being a main surface to be a mounting surface, two or more of the ground electrodes being exposed to the side surface of the ceramic multilayer substrate and protruding from the side surface, and being electrically connected to the shielding film, on the side surface of the ceramic multilayer substrate, the two or more of the ground electrodes including a first ground electrode and a second ground electrode, the first ground electrode being provided at a layer closest to the first main surface among the layers provided with the respective ground electrodes and protruding from the side surface of the ceramic multilayer substrate, and the second ground electrode being provided at a layer next closest to the first main surface among the layers provided with the respective ground electrodes, the first ground electrode protruding from the side surface of the ceramic multilayer substrate at a maximum protruding amount of a (μm), in a side view of the ceramic multilayer substrate, a minimum distance between the first ground electrode and the second ground electrode being 3^(0.5)a+5 (μm) or greater.
 3. The high-frequency electronic component according to claim 1, wherein the ceramic multilayer substrate includes a first main surface and a second main surface opposite to each other in the thickness direction, the second main surface is a main surface to be a mounting surface, on the side surface of the ceramic multilayer substrate, the two or more of the ground electrodes including a first ground electrode and a second ground electrode, the first ground electrode being provided at a layer closest to the first main surface among the layers provided with the respective ground electrodes, and the second ground electrode being provided at a layer next closest to the first main surface among the layers provided with the respective ground electrodes, with an exposed length of the second ground electrode being greater than an exposed length of the first ground electrode.
 4. The high-frequency electronic component according to claim 1, wherein the ceramic multilayer substrate includes a first main surface and a second main surface opposite to each other in the thickness direction, the second main surface is a main surface to be a mounting surface, on the side surface of the ceramic multilayer substrate, the two or more of the ground electrodes including one or more first ground electrodes and one or more second ground electrodes, the one or more first ground electrodes being provided at a layer closest to the first main surface among the layers provided with the respective ground electrodes, and the one or more second ground electrodes being provided at a layer next closest to the first main surface among the layers provided with the respective ground electrodes, with a number of the one or more first ground electrodes being smaller than a number of the one or more second ground electrodes.
 5. The high-frequency electronic component according to claim 1, wherein the ceramic multilayer substrate includes a first side surface and a second side surface opposite to each other in a length direction perpendicular to the thickness direction, and a third side surface and a fourth side surface opposite to each other in a width direction perpendicular to the thickness direction and the length direction, on at least one side surface among the first side surface, the second side surface, the third side surface, and the fourth side surface, the two or more of the ground electrodes at least partially overlap each other in the thickness direction of the ceramic multilayer substrate, with a distance in the thickness direction between the overlapping ground electrodes being 5 μm or greater.
 6. The high-frequency electronic component according to claim 1, wherein the high-frequency electronic component is a chip component or a substrate.
 7. A module comprising the high-frequency electronic component according to claim
 1. 8. The module according to claim 7, wherein the ceramic multilayer substrate includes a first main surface and a second main surface opposite to each other in the thickness direction, the first main surface and the second main surface of the ceramic multilayer substrate are each provided with an electronic component, the electronic component mounted on the first main surface and the electronic component mounted on the second main surface are each sealed by a mold resin, the shielding film covers the side surface of the ceramic multilayer substrate and a side surface of the mold resin.
 9. The high-frequency electronic component according to claim 2, wherein the two or more of the ground electrodes each comprise a wiring layer exposed to the side surface of the ceramic multilayer substrate but not protruding from this side surface and a protrusion provided on the wiring layer.
 10. The high-frequency electronic component according to claim 2, wherein on the side surface of the ceramic multilayer substrate, an exposed length of the second ground electrode being greater than an exposed length of the first ground electrode.
 11. The high-frequency electronic component according to claim 2, wherein on the side surface of the ceramic multilayer substrate, a number of the one or more first ground electrodes being smaller than a number of the one or more second ground electrodes.
 12. The high-frequency electronic component according to claim 3, wherein on the side surface of the ceramic multilayer substrate, a number of the one or more first ground electrodes being smaller than a number of the one or more second ground electrodes.
 13. The high-frequency electronic component according to claim 2, wherein the ceramic multilayer substrate includes a first side surface and a second side surface opposite to each other in a length direction perpendicular to the thickness direction, and a third side surface and a fourth side surface opposite to each other in a width direction perpendicular to the thickness direction and the length direction, on at least one side surface among the first side surface, the second side surface, the third side surface, and the fourth side surface, the two or more of the ground electrodes at least partially overlap each other in the thickness direction of the ceramic multilayer substrate, with a distance in the thickness direction between the overlapping ground electrodes being 5 μm or greater.
 14. The high-frequency electronic component according to claim 3, wherein the ceramic multilayer substrate includes a first side surface and a second side surface opposite to each other in a length direction perpendicular to the thickness direction, and a third side surface and a fourth side surface opposite to each other in a width direction perpendicular to the thickness direction and the length direction, on at least one side surface among the first side surface, the second side surface, the third side surface, and the fourth side surface, the two or more of the ground electrodes at least partially overlap each other in the thickness direction of the ceramic multilayer substrate, with a distance in the thickness direction between the overlapping ground electrodes being 5 μm or greater.
 15. The high-frequency electronic component according to claim 4, wherein the ceramic multilayer substrate includes a first side surface and a second side surface opposite to each other in a length direction perpendicular to the thickness direction, and a third side surface and a fourth side surface opposite to each other in a width direction perpendicular to the thickness direction and the length direction, on at least one side surface among the first side surface, the second side surface, the third side surface, and the fourth side surface, the two or more of the ground electrodes at least partially overlap each other in the thickness direction of the ceramic multilayer substrate, with a distance in the thickness direction between the overlapping ground electrodes being 5 μm or greater.
 16. The high-frequency electronic component according to claim 2, wherein the high-frequency electronic component is a chip component or a substrate.
 17. The high-frequency electronic component according to claim 3, wherein the high-frequency electronic component is a chip component or a substrate.
 18. The high-frequency electronic component according to claim 4, wherein the high-frequency electronic component is a chip component or a substrate.
 19. The high-frequency electronic component according to claim 5, wherein the high-frequency electronic component is a chip component or a substrate.
 20. A module comprising the high-frequency electronic component according to claim
 2. 